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Thermal Microscope TM3

Thermophysical property measurement become easier

Thermal Microscope TM3

Feature

  • Non contact measurement of nano order thin film with micro scale spatial resolution.
  • Multiple samples could be automatically measured 10 seconds each.
  • Thermophysical property measurement for thin films, 100nm order.
  • 2 dimensional measurement with φ3μm resolution.
  • Non contact measurement with laser.

Basic Theory

Sputter Mo thin film on a sample and periodically heat the surface with heating laser. Heat propagates through the Mo thin film and reaches to the sample. A phase lag occurs to the temprature response. The phase lag varies with sample's thermophysical characteristics. Since reflectance of Mo changes according to the temperature, by irradiating and datecting the amplitude variation of a probe laser beam which is coaxial to the heating laser, relative temperature variation of the surface could be measured. By using this method, thermal effusivity measurement in high spatial resolution become possible. Heat capacity per unit volume and thermal conductivity could be calculated by optional software.

Basic Theory

Specification

Product Thermal Microscope TM3B
Mode Thermophisical property distribution measurement (Line, 2D, point)
Measurement Thermal effusivity, (Heat capacity), (Thermal Conductivity)
Spot size About 3 [μm]
Time of measurement 10 seconds per point
Thickness Sub micrometers to μm
Repetition accuracy ±10% for Pyrex and Silicon in thermal effusivity
Sample 1. Holder size 30×30×5 [mm]
2. Sample size less than 30×30×3 [mm]
  • Sample surface must be polished.
  • Sample surface must be sputtered with Molybdenum.
Operating Temperature 24℃±1 [℃] (sensor inside the system)
XY stage displacement ・X axis 20 [mm]
・Y axis 20 [mm]
・Z axis 10 [mm]
Heating laser Laser diode 808 [nm]
Probe laser Laser diode 658 [nm]
Power Supply AC 100 [V] 1.5 [kVA]
Accessories Sample holder, Reference samples
※Option Optional table, Air-conditioning equipments, Booth for air-conditioning, Sputtering eqiopment
  • The standard system is fixed with measuring depth for thin films. Customizing is needed for varying the measuring depth.

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